Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD, MEMORY MEDIUM, AND SUBSTRATE PROCESSING APPARATUS

Japan, Oct. 15 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD, MEMORY MEDIUM, AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-050090

Category (FI): G03F7/16,501,G03F7/20,521,G03F7/30,501,H01L21/30,564@D,H01L21/30,569@F,H10P76/00,564@D,H10P76/00,569@F

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 25, 2022

Publication Date: Oct. 6, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.