Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Japan, March 3 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2024-116115

Category (FI): H10P70/00,108@G,H01L21/304,647@A,H01L21/304,643@A,H01L21/304,648@G,H10P70/00,103@A,H10P70/00,107@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 19, 2024

Publication Date: Oct. 16, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.