Japan, March 24 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-150573
Category (FI): H01L21/302,201@A,H10P50/20,201@A,H10P50/24
Stage: Grant (IP right document published.)
Filing Date: Sept. 21, 2022
Publication Date: April 2, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
