Japan, Oct. 15 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:
Application Number: JP,2022-170874
Category (FI): H10P50/20,105@Z,C23C16/42,C23C16/56,H01L21/302,105@Z,H10P50/28
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 25, 2022
Publication Date: May 10, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
