Japan, Nov. 17 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2021-068523
Category (FI): H01L21/302,105@A,H01L21/302,101@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 14, 2021
Publication Date: Oct. 26, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
