Japan, July 14 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING DEVICE, RECIPE GENERATION DEVICE, SUBSTRATE PROCESSING METHOD, AND RECIPE GENERATION METHOD.' Other related details are as follows:
Application Number: JP,2022-149356
Category (FI): G01N21/956@A,G03F7/20,521,G03F7/20,501
Stage: PROBLEM TO BE SOLVED: To provide a substrate processing device with which it is possible to efficiently inspect a plurality of substrates without requiring complicated work for generating an inspection recipe.SOLUTION: A mask identifier for identifying the photomask that is used in exposure processing is correlated to a substrate for which predetermined accompanying processing that accompanies exposure processing is carried out. A substrate processing device 100 includes an inspection unit 104. The inspection unit 104 operates in pilot mode or inspection mode. In the pilot mode, a plurality of pilot data for generating an inspection recipe regarding a plurality of substrates are generated. A mask identifier for the substrate for which pilot data was acquired is correlated to each of the plurality of pilot data. When an inspection recipe corresponding to the mask identifier of a substrate for which accompanying processing is carried out has been generated, the inspection unit 104 operates in the inspection mode and determines the presence of defects in substrates in accordance with the inspection recipe.SELECTED DRAWING: Figure 1 (Grant)
Filing Date: Sept. 20, 2022
Publication Date: April 2, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
