Japan Intellectual Property Rights: SUBSTRATE PROCESSING SYSTEM AND POSITION MEASUREMENT METHOD

Japan, Oct. 21 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM AND POSITION MEASUREMENT METHOD.' Other related details are as follows:

Application Number: JP,2022-140993

Category (FI): G01B11/00@B,H01L21/02@B,H01L21/66@P,H01L21/68@N,H10P10/00@A,H10P10/00@F,H10P10/00@Z,H10P56/00@A,H10P72/70,H10P74/20@P

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 5, 2022

Publication Date: March 15, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.