Japan Intellectual Property Rights: SUBSTRATE PROCESSING SYSTEM AND PROGRAM

Japan, Sept. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM AND PROGRAM.' Other related details are as follows:

Application Number: JP,2025-152019

Category (FI): H01L21/68@N,H01L21/304,622@R,H01L21/02@B,B23K26/53,B24B7/04@A,H10P52/00@R,H10P52/00@W,H10P72/70,H10P52/00@C,H10P10/00@A,H01L21/304,601@Z,H01L21/304,631

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 12, 2025

Publication Date: Dec. 16, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.