Japan, July 14 -- CANON INC has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-097321
Category (FI): G03F9/00@H,G03F7/20,521,H01L21/68@G,H10P72/50@G
Stage: PROBLEM TO BE SOLVED: To provide a substrate processing system capable of reducing the time required for alignment.SOLUTION: The substrate processing system is for processing a plurality of substrates including a first substrate and a second substrate. The substrate processing system has a first alignment unit for aligning the substrates and a second alignment unit for aligning the substrates prior to the alignment by the first alignment unit. The second alignment unit aligns the second substrate using information based on a correction amount of the position of the first substrate when the first alignment unit performs the alignment of the first substrate before carrying the second substrate into the first alignment unit.SELECTED DRAWING: Figure 5 (Grant)
Filing Date: June 16, 2022
Publication Date: Dec. 28, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
