Japan Intellectual Property Rights: SUBSTRATE PROCESSING SYSTEM

Japan, Jan. 27 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:

Application Number: JP,2025-017363

Category (FI): H01L21/306@R,H01L21/304,648@G,H01L21/304,648@F,H10P70/00,108@F,H10P70/00,108@G,H10P70/00,108@K,H10P50/60@R,H01L21/304,648@K

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 5, 2025

Publication Date: April 11, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.