Japan, Aug. 26 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:
Application Number: JP,2025-131248
Category (FI): H01L21/68@A,H10P72/30,H10P72/30@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 6, 2025
Publication Date: Oct. 17, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
