Japan, March 3 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2024-197423
Category (FI): H01L21/302,101@G,H01L21/68@R,H02N13/00@D,H10P50/20,101@G,H10P72/72
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 12, 2024
Publication Date: Feb. 26, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
