Japan Intellectual Property Rights: SUPERCRITICAL WAFER CLEANING/DRYING MEDIUM RECOVERY METHOD AND SYSTEM

Japan, April 28 -- ZHEJIANG UNIV has got intellectual property rights for 'SUPERCRITICAL WAFER CLEANING/DRYING MEDIUM RECOVERY METHOD AND SYSTEM.' Other related details are as follows:

Application Number: JP,2024-218888

Category (FI): B01D53/04,220,H10P70/00,108@K,H01L21/304,648@F,H10P70/00,108@F,H01L21/304,651@Z,H01L21/304,648@K,H10P70/00,201@N,H10P70/00,201@Z,B01J3/06@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Dec. 13, 2024

Publication Date: June 26, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.