Japan, Feb. 24 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUPPORTING DEVICE, METHOD FOR SUPPORTING, AND PROGRAM.' Other related details are as follows:
Application Number: JP,2022-006753
Category (FI): H01L21/02@Z,H10P95/00,102@B,H10P70/00,108@H,H01L21/304,648@H,G05B23/02@T,G05B19/418@Z
Stage: PROBLEM TO BE SOLVED: To provide a supporting device that allows a maintenance worker to rapidly perform a proper maintenance work on a substrate processor regardless of the degree of skills.SOLUTION: A supporting device 4 supports the maintenance work of at least one substrate processor 1. Also, the supporting device 4 acquires separation degree information. The separation degree information shows the degree of separation between plural pieces of processing information predicted on the basis of the invariant relationship among plural pieces of processing information showing operations or states related to processing of the substrate W of at least one substrate processor 1 and plural pieces of processing information actually collected from the substrate processor 1 and the actually collected pieces of processing information. The supporting device 4 generates supporting information on the maintenance work of at least one substrate processor 1 on the basis of the acquired separation degree information.SELECTED DRAWING: Figure 1 (Grant)
Filing Date: Jan. 19, 2022
Publication Date: July 31, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
