Japan, March 3 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'SYSTEM AND METHOD FOR MULTI-LEVEL PULSE IN RF PLASMA TOOL.' Other related details are as follows:
Application Number: JP,2024-137489
Category (FI): H01L21/205,H01L21/302,101@C,H05H1/46@R,H10P14/20,H10P14/24,H10P50/20,101@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 19, 2024
Publication Date: Nov. 8, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
