Japan, July 14 -- DISCO CORP has got intellectual property rights for 'TAPE STICKING DEVICE.' Other related details are as follows:
Application Number: JP,2022-091454
Category (FI): H10P58/00@M,H10P72/70,H01L21/68@N
Stage: PROBLEM TO BE SOLVED: To prevent positional displacement of a sticking position of a tape to a stuck object in a tape sticking device.SOLUTION: A tape sticking device 1 comprises: a holding section 3 for holding a wafer W, which is one example of a stuck object, and a ring frame F; a peel plate 50 which bends a tape set TS at an acute angle and peeling a dicing tape TB from a sheet TA; a sticking roller 60 which sticks the dicing tape TB to the wafer W and the ring frame F by pressing the dicing tape TB, which is one example of a tape peeled from the sheet TA by the peel plate 50, to the wafer W and the ring frame F; an air nozzle 39 which brings a tip end of the dicing tape TB peeled from the sheet TA along an outer side face of the sticking roller 60; and a tip end detection section 8 which detects the tip end of the dicing tape TB brought along the outer side face of the sticking roller 60.SELECTED DRAWING: Figure 2 (Grant)
Filing Date: June 6, 2022
Publication Date: Dec. 18, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
