Japan, Nov. 11 -- TOKYO ELECTRON LTD has got intellectual property rights for 'TEMPERATURE SENSOR AND PLASMA TREATMENT DEVICE.' Other related details are as follows:
Application Number: JP,2024-034490
Category (FI): G01K1/14@L,G01K1/08@P,H01L21/31@C,G01K7/02@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 7, 2024
Publication Date: April 19, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
