Japan, Oct. 21 -- CARL ZEISS SMT GMBH has got intellectual property rights for 'TEST SYSTEM FOR CAMERA, MASK INSPECTION SYSTEM, AND METHOD FOR TESTING CAMERA.' Other related details are as follows:
Application Number: JP,2024-205414
Category (FI): H01L21/66@J,G03F1/84,H10P74/20@J
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 26, 2024
Publication Date: June 12, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
