Japan, Jan. 21 -- DISCO ABRASIVE SYST LTD has got intellectual property rights for 'VACUUM DEVICE AND PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2021-189974
Category (FI): H01L21/68@P,F04F5/04@B,H10P52/00@C,H10P58/00@F,H10P72/78,B23Q3/08@A,B24B41/06@L,H01L21/78@F,H01L21/304,631
Stage: Grant (IP right document published.)
Filing Date: Nov. 24, 2021
Publication Date: June 5, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
