Japan, Nov. 17 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP.' Other related details are as follows:
Application Number: JP,2024-063069
Category (FI): F04B37/16@D,H01L21/302,101@H
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 10, 2024
Publication Date: July 10, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
