Japan, June 10 -- TOKYO ELECTRON LTD has got intellectual property rights for 'VAPORIZER, SEMICONDUCTOR MANUFACTURING SYSTEM AND METHOD FOR EVAPORATING SOLID MATERIAL.' Other related details are as follows:
Application Number: JP,2022-165171
Category (FI): H10P14/43,H01L21/285@C,C23C16/448
Stage: Grant (IP right document published.)
Filing Date: Oct. 14, 2022
Publication Date: April 25, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
