Japan, Jan. 21 -- ASM IP HOLDING BV has got intellectual property rights for 'VENTED SUSCEPTOR.' Other related details are as follows:
Application Number: JP,2021-101636
Category (FI): H10P14/24,C23C16/458,H01L21/68@N,H10P72/70,H01L21/205
Stage: Grant (IP right document published.)
Filing Date: June 18, 2021
Publication Date: Jan. 11, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
