Japan, March 25 -- TAK THIN FILM DEVICE LABORATORY INC,CHEMITORONICS CO LTD has got intellectual property rights for 'WAFER CARRIER AND PROCESS CONTROL SYSTEM USING THE SAME.' Other related details are as follows:
Application Number: JP,2021-099047
Category (FI): H01L21/02@Z,H01L21/68@U,H10P72/10@U
Stage: Grant (IP right document published.)
Filing Date: April 29, 2021
Publication Date: Nov. 11, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
