Japan Intellectual Property Rights: WAFER CLEANING DEVICE

Japan, Oct. 15 -- DISCO CORP has got intellectual property rights for 'WAFER CLEANING DEVICE.' Other related details are as follows:

Application Number: JP,2022-124729

Category (FI): H10P70/00,103@A,H10P70/00,103@C,H01L21/304,622@J,H01L21/304,631,H01L21/304,622@Q,H10P52/00@C,H10P52/00@M,H10P52/00@T,H01L21/304,643@C,H01L21/304,643@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Aug. 4, 2022

Publication Date: Feb. 16, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.