Japan, Oct. 15 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'WAFER CONTAINER CLEANING DEVICE.' Other related details are as follows:
Application Number: JP,2024-003496
Category (FI): H10P72/10@T,H01L21/304,648@K,H10P70/00,108@K,H10P70/00,108@E,H01L21/304,648@E,H01L21/68@T
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 12, 2024
Publication Date: July 25, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
