Japan Intellectual Property Rights: WAFER PROCESSING DEVICE, SYSTEM, AND CONTROL METHOD APPLIED TO WAFER PROCESSING DEVICE

Japan, Jan. 16 -- SHENZHEN SHENGWEIXU TECH CO LTD has got intellectual property rights for 'WAFER PROCESSING DEVICE, SYSTEM, AND CONTROL METHOD APPLIED TO WAFER PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2025-012537

Category (FI): H01L21/22,511@B,H01L21/31@E,H01L21/324@S,H10P14/60,101@E,H10P32/00,201@B,H10P95/90,101@S

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Jan. 29, 2025

Publication Date: April 23, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.