Japan, Feb. 24 -- TOKYO SEIMITSU CO LTD has got intellectual property rights for 'WORK-PIECE PROCESSING DEVICE AND CONTROL METHOD OF THE SAME.' Other related details are as follows:
Application Number: JP,2024-096626
Category (FI): H10P58/00@F,H10P58/00@C,G01B11/24@D,H01L21/78@F,H01L21/78@C,B24B27/06@M,B24B49/04@Z,B24B49/12
Stage: PROBLEM TO BE SOLVED: To provide a work-piece processing device and a control method of the same in which measurement of processing quality of a part to be processed in a work-piece can be performed with a white-light interferometer for a short time.SOLUTION: A work-piece processing device comprises: a processing control part 78 which drives a processing head (blade 22A, 22B) and a relative movement mechanism 49 to form a part to be processed in a work-piece W; a scan control part 85 which integrates the processing head and a white-light interferometer 24 and performs step scan relatively in a direction orthogonal to a table; an interference signal acquisition part 81 which acquires interference signal from the white-light interferometer 24; an estimation part 82 which estimates a position of the white-light interferometer 24 where intensity of the interference signal becomes a peak value; and a processing quality measuring part 83 which measures at least one of a processing position of the part to be processed and a processing shape thereof based on the estimation result of the estimation part 82. The processing control part 78 executes a first processing treatment to form a first groove and a second processing treatment to form a second groove on a bottom part of the first groove.SELECTED DRAWING: Figure 9 (Grant)
Filing Date: June 14, 2024
Publication Date: Aug. 29, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
